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FHA Series
Mass flow sensors for gases
FEATURES * Ranges 0...200 slpm1 * Actual mass flow sensing * 1...5 V output * Sensortechnics PRO services
MEDIA COMPATIBILITY
To be used with dry gases only The FHA series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor
SPECIFICATIONS
Maximum ratings Supply voltage2 8 to 15 V typ. 10 0.01 V 60 mW
ELECTRICAL CONNECTION
4321
Power consumption Output load NPN (Sinking) PNP (Sourcing) Temperature limits Operating Storage Mechanical shock
10 mA 20 mA
Pin 1: N/A Pin 2: GND Pin 3: +Vs Pin 4: Vout
-25 to 85C -40 to 90C 100 g (3 drops, 3 axes)
4321
Note: Device will be supplied with electrical connector
Note: 1 SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0C, 1 bar, 50% RH. 2 Output voltage is ratiometric to supply voltage
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FHA Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS3
(VS = 10 0.01 V, TA = 25C)
Part no.
FHAL200DU
Flow range (full scale)
200 SLPM1
Output voltage @ trim point
5.0 0.36 V @ 200 SLPM1
PERFORMANCE CHARACTERISTICS
(VS = 10 0.01 V, TA = 25C)
Characteristics
Zero offset Repeatability and hysteresis (combined) Ratiometricity error2 Temperature effects Offset4 Span Response time Common mode pressure -20 to 85 C 25 to 10 C 25 to 40 C
Min.
0.95
Typ.
1.0 0.30 0.25 -2.0 2.0 6.0
Max.
1.05 0.5
Unit
V % reading V % reading ms
25
p si
Notes: 1 SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0C, 1 bar, 50% RH. 2 Output voltage is ratiometric to supply voltage 3 A 5 micron filter is recommended for all devices. 4 Shift is relative to 25 C.
NOTICE: LAMINAR FLOW
Due to the fast response time of the sensor, these specifications were generated using laminar flow. Airflow instability or "turbulence" present in the airstream will result in an increase in measurement uncertainty. The turbulent flow problem can be corrected by either straightening the airflow using flow laminarizing or by slowing the response of the sensor using a simple RC time constant on the output of the sensor. This, of course, slows down the sensor response time. The values needed depend on the amount of turbulence present in the application. Several techniques for laminarizing the flow include adding hex shaped honeycombs, foam, screen materials or adding constrictors (frits) to the flow stream. There are various commercial laminar flow elements that can be purchased. Unfortunately the greater the efficiency of the laminarizer, the greater the increase in pressure drop in order to establish a given flow rate. Plastic honeycomb material probably gives the most improvement for the least pressure drop. In any test fixture, the avoidance of sharp radii is an absolute requirement.
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FHA Series
Mass flow sensors for gases
FLOW SPECIFICATIONS (VS = 10 0.01 V, TA = 25C)
Flow (slpm) 0 25 50 75 100 150 200 Nom. (VDC) 1.00 2.99 3.82 4.30 4.58 4.86 5.00 Tol. (VDC) 0.05 0.18 0.36 Press. drop (inch H2O) 0 0.04 0.13 0.21 0.34 0.65 1.09 (mbar) 0 0.10 0.33 0.53 0.85 1.64 2.74
OUTPUT VS. FLOW CURVE
GAS CORRECTION FACTORS5
Gas type
Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2)
Correction factor (approx.)
0.56 0.76 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35
Notes: 5 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 6 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V
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FHA Series
Mass flow sensors for gases
OUTLINE DRAWING
O 3.6 (0.14) R 2.8 (0.11) 19.6 (0.77)
22.9 (0.90) 1.3 (0.05)
22 mm (0.87 inch) medical connector per ISO 5356
O 22.6 (0.89)
O 21.7 O 19.7 (0.85) (0.78)
36.8 (1.45)
mass: approx. 34 g
Pin 4 3 2 1
Molded-in arrow on device designates flow direction
17.3 (0.68) 22.3 (0.88) 33.8 (1.33)
third angle projection dimensions in mm (inches)
ORDERING INFORMATION - AVAILABLE LISTINGS
Note: Preferred listings are highlighted in grey
Flow range 200 S LP M
Dry gas FHAL200DU
Note: Device will be supplied with 4 pin receptacle connector (see Electrical Connection info)
Sensortechnics PRO services: * Extended guarantee period of 2 years * Improved performance characteristics * Custom product modifications and adaptations even for small quantities * Advanced logistics models for supply inventory and short delivery times * Technical support through application engineers on the phone or at your site * Fastest possible technical response for design and QA engineers ... plus other services on request
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11726 / A 4/4
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